Stability Analysis of a MEMS Acceleration Sensor

The electrostatic actuation with its several advantages is the main principle for micro-electro-mechanical systems (MEMS). One major drawback is the nonlinear behavior, which results into instability, known as the electrostatic pull-in effect. This effect might also push a closed-loop... Ausführliche Beschreibung

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veröffentlicht: Chemnitz: Universitätsbibliothek Chemnitz, 2007
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