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Zitate

APA Zitierstil
Calvo, J., Steinke, P., Wislicenus, M., Gerlich, L., Seidel, R., Clauss, E., & Uhlig, B. (2016). Organosilane Downstream Plasma On Ultra Low-k Dielectrics: Comparing Repair With Post Etch Treatment: Organosilane Downstream Plasma On Ultra Low-k Dielectrics:Comparing Repair With Post Etch Treatment.Universitätsbibliothek Chemnitz.
ISBD Zitierstil
Calvo, Jesús:
Organosilane Downstream Plasma On Ultra Low-k Dielectrics: Comparing Repair With Post Etch Treatment : Organosilane Downstream Plasma On Ultra Low-k Dielectrics:Comparing Repair With Post Etch Treatment. : Universitätsbibliothek Chemnitz, 2016.
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MLA Zitierstil
Calvo, Jesús, et al. Organosilane Downstream Plasma On Ultra Low-k Dielectrics: Comparing Repair With Post Etch Treatment: Organosilane Downstream Plasma On Ultra Low-k Dielectrics:Comparing Repair With Post Etch Treatment.Universitätsbibliothek Chemnitz, 2016.
Achtung: Diese Zitate sind unter Umständen nicht zu 100% korrekt.