@book{ 22-ch1-qucosa-207108, title = {Porous Ultra Low-k Material Integration Through An Extended Dual Damascene Approach: Pre-/ Post-CMP Curing Comparison}, author = {Calvo, Jesús and Koch, Johannes and Thrun, Xaver and Seidel, Robert and Uhlig, Benjamin}, editor = {Koch, Johannes}, editor = {Thrun, Xaver}, editor = {Seidel, Robert}, editor = {Uhlig, Benjamin}, address = {Chemnitz}, publisher = {Technische Universität Chemnitz}, year = {2016}, language = {English}, url = {https://nbn-resolving.org/urn:nbn:de:bsz:ch1-qucosa-207108}, url = {https://katalog.hgb-leipzig.de/Record/22-ch1-qucosa-207108} }