@book{ 22-ch1-qucosa-207219, title = {Requirements and challenges on an alternative indirect integration regime of low-k materials}, author = {Haase, Micha and Ecke, Ramona and Schulz, Stefan E.}, editor = {Ecke, Ramona}, editor = {Schulz, Stefan E.}, address = {Chemnitz}, publisher = {Technische Universität Chemnitz}, year = {2016}, language = {English}, url = {https://nbn-resolving.org/urn:nbn:de:bsz:ch1-qucosa-207219}, url = {https://katalog.hgb-leipzig.de/Record/22-ch1-qucosa-207219} }