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1. Select result number 1
   1
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   Organosilane Downstream Plasma On Ultra Low-k Dielectrics: Comparing Repair With Post Etch Treatment: Organosilane Downstream Plasma On Ultra Low-k Dielectrics:Comparing Repair Wit...

   by Calvo, Jesús
   published 2016

   Subjects: “...low-k...”
   

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2. Select result number 2
   2
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   Porous Ultra Low-k Material Integration Through An Extended Dual Damascene Approach: Pre-/ Post-CMP Curing Comparison

   by Calvo, Jesús
   published 2016

   Subjects: “...low-k...”
   

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3. Select result number 3
   3
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   Reaction Paths of Repair Fragments on Damaged Ultra-low-k Surfaces

   by Förster, Anja
   published 2015

   Subjects: “...Ultra-low-k...”
   

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4. Select result number 4
   4
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   Low-k SiCxNy Etch-Stop/Diffusion Barrier Films for Back-End Interconnect Applications

   by Leu, Jihperng
   published 2016

   Subjects: “...low-k...”
   

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5. Select result number 5
   5
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   Beiträge zur Technologieentwicklung für die Erzeugung von Airgap - Strukturen in Metallisierungssystemen in integrierten Schaltkreisen

   by Schulze, Knut
   published 2008

   Subjects: “...Low-k...”
   

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6. Select result number 6
   6
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   AMC 2015 – Advanced Metallization Conference

   published 2016

   Subjects: “...low-k dielectrics...”
   

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7. Select result number 7
   7
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   Requirements and challenges on an alternative indirect integration regime of low-k materials

   by Haase, Micha
   published 2016

   Subjects: “...ultra low-k dielectric...”
   

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8. Select result number 8
   8
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   Wetting Optimized Solutions for Plasma Etch Residue Removal for Application in Interconnect Systems of Integrated Circuits: Benetzungsoptimierte Reinigungslösungen für die Entfernu...

   by Ahner, Nicole
   published 2013

   Subjects: “...Low-k Dielektrika...”
   

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9. Select result number 9
   9
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   Electron microscopic studies of low-k inter-metal dielectrics

   by Singh, Pradeep Kumar
   published 2014

   Subjects: “...Low-k Dielektrikum...”
   

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10. Select result number 10
    10
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    Das Konzept des effektiven Indenters für die Ermittlung des Elastizitätsmoduls und der Fließgrenze dünner Schichten

    by Herrmann, Matthias
    published 2010

    Subjects: “...poröse Low-k-Dielektrika...”
    

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